-24-
No.DOC1048575-1
7. LED indication / Diagnosis history
7.1. LED indication
Process Data Watchdog Timeout / EtherCAT Watchdog Timeout
One of the following may have occurred.
Valve has a short circuit.
Pressure sensor has a short circuit.
Pressure sensor has a failure/disconnection.
No connection or a disconnection between the SI Unit and the vacuum
manifold.
A firmware error is occurring.
One of the following may have occurred.
The setting of the supply valve type has a mismatch.
The setting of the pressure threshold/hysteresis has a failure.
Valve protection function is operating.
No diagnosis information.
Port 1: No Link / No Activity
Port 1: Link / No Activity
Port 2: No Link / No Activity
Port 2: Link / No Activity
Power supply for logic/input (PWR) is not present.
Power supply for logic/input (PWR) is present but is low.
(< approx. 18 VDC)
Power supply for logic/input (PWR) is present.
Power supply for output (PWR(V)) is low or is not present.
Power supply for output (PWR(V)) is present.