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No.DOC1048575-1
4. Process data
Table 4-1. Overview of process data
Refer to Section 4.1.1 or Section 4.1.2.
In the 3.2 vacuum manifold stations setting,
Size is 1.0 for 4 or 8 stations and 2.0 for 12 or
16 stations.
Refer to Section 4.1.3.
The number of CHs displayed depends on the
3.2 vacuum manifold stations setting.
Refer to Section 4.1.4.
The number of CHs displayed depends on the
3.2 vacuum manifold stations setting.
Refer to Section 4.2.1 or Section 4.2.2.
In the 3.2 vacuum manifold stations setting,
Size is 1.0 for 4 or 8 stations and 2.0 for 12 or
16 stations.