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No.DOC1048575-1
4.1. Input process data
4.1.1. Vacuum status
Table 4-2. Vacuum status
0: No vacuum adsorption
1: During vacuum adsorption
The vacuum status thresholds and hysteresis are
set in Sections 5.1.1 and Section 5.1.2.
Valid values are up to CH3 for the vacuum manifold
4-stations setting, up to CH7 for the 8-stations
setting and up to CH11 for the 12-stations setting.
4.1.2. Release status
Table 4-3. Release status
0: No vacuum release
1: During vacuum release
The release status thresholds and hysteresis are
set in Sections 5.1.5 and Section 5.1.6.
Valid values are up to CH3 for the vacuum manifold
4-stations setting, up to CH7 for the 8-stations
setting and up to CH11 for the 12-stations setting.
Release confirmation CH10
Release confirmation CH11
Release confirmation CH12
Release confirmation CH13
Release confirmation CH14
Release confirmation CH15