-25-
No.DOC1048575-1
Fig 7-2. LED lighting patterns
7.2. Diagnosis history
Table 7-1. Diagnosis history
Valve short circuit on CH x
Valve short circuit has occurred at CHx ejector.
Pressure sensor short circuit
Pressure sensor short circuit has occurred.
Pressure sensor
failure/disconnection CH x
Pressure sensor failure/disconnection has occurred at CHx ejector.
Vacuum manifold no connection
SI Unit activated with the vacuum manifold unconnected.
Vacuum manifold disconnection
Disconnection of the vacuum manifold has occurred.
Configuration error in vacuum
manifold stations
The number of connected vacuum manifold does not match with
respect to vacuum manifold stations setting (Slot 1).
A firmware error has occurred.
Supply valve type parameter
setting failure CH x
Supply valve type setting mismatch detected.
Pressure/Hysteresis parameter
setting failure CH x
Pressure threshold/hysteresis setting failure has occurred.
Valve protection function has operated at CHx ejector.
Voltage drop of power supply for
logic/input
Power supply for logic/input has dropped. (< approx. 18 VDC).
Blinking (2.5Hz) Single Flash
200ms 200ms
ON ON
1s
OFF OFF
200ms
Flickering (10Hz) Double Flash
50ms 200ms
ON ON
1s
OFF OFF
50ms 200ms
Flashing (0.5Hz)
ON
1s 1s
OFF