-28-
No.PF※※-OMJ0006-G
■[F 3] Operating fluid
In the default setting, the PFM is intended for use with dry air or N
2
.
It is necessary to change the setting when Argon (Ar) or carbon dioxide (CO
2
) are used.
: When CO
2
is selected, the upper limit of measurement flow range is half that of other fluids.
<Operation>
Press the or
button in function selection mode to display [F 3].
Press the button.
Press the button. Return to function selection mode.
[F 3] Selection of operating fluid completed