ULVAC CRYOGENICS INCORPORATED S-1
Compressor Unit Safety Instructions
Read this manual and follow these safety guidelines before installing, operating, or
servicing the compressor unit.
Our Cryo-U
®
cryopump and Super Trap refrigeration systems make a refrigeration cycle by
circulating high pressure helium gas. Charging helium gas more than appropriate amount
does not improve refrigeration capacity. Instead, if excessive helium gas is filled and
pressure becomes higher than the appropriate value, gas will release from the safety valve
and its sheet may become clogged with dust. This may even cause leakage as well as
overload the compressor motor.
Never charge helium gas more than specified in Table 1-1.
When charging helium gas or performing helium line decontamination, refer to the
“Maintenance” section and follow the instruction.
The equipments (regulators, charging hoses, adopters, etc.) that can be used at the
pressure of 2.0MPaG or higher are required to perform the above work.
Do not shutdown and startup the compressor unit frequently.
The number of shutdown and startup of a compressor motor must be limited within 6 times
per hour, and each status should be kept for at least 3 minutes. Frequent shutdowns and
startups may shorten the insulation life of a compressor motor and may lead to failure.
When the compressor unit runs multiple refrigerators, the number of shutdown and startup
of refrigerator motors must also be limited within 6 times per hour.
Do not attempt to control the temperature of a Super Trap by starting up and shutting down
the compressor unit.
Please contact us when the Super Trap needs temperature control operation.
2. Adding helium gas and charging equipments
3. Do not shutdown / startup frequently
1. Do not exceed the appropriate helium charge
pressure.