Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED A-1
Appendix A
TROUBLESHOOTING
◆ Disconnect the compressor from its power source before performing any
troubleshooting procedures.
◆ The compressor unit is hot after operating. Wait for the unit to cool
down before working on the inside of the compressor.
Table A-1 Troubleshooting Fault Diagnosis
Problems Possible Causes Corrective Actions
Ⅰ.
When turning on the
compressor, it will
not start.
1) No power coming from source.
Check the power source
connector associated with the
power source.
2) Circuit protectors(MCP,CP1,
CP2)remain in OFF position.
Referring to Figure 1-2, turn on
the circuit protector.
3) The alarm has been activated.
(Check the Alarm code on the
ALARM display.)
Referring Table 4-2 and 4-4,
correct the cause of the alarm.
Then press RESET key.
Ⅱ.
Compressor unit
stops during the
normal operation.
The alarm has been activated.
(Check the Alarm code on the ALARM
display.)
Referring Table 4-2 and 4-4,
correct the cause of alarm.
Then press RESET key.
Ⅲ.
Compressor makes
unusual noise during
the normal operation.
The helium static pressure is high. Do not charge helium gas over
1.24MPaG(at20℃).
WARNING