Ulvac C30PZ - Operating Log

Appendix A Troubleshooting
A-2 ULVAC CRYOGENICS INCORPORATED  
Table A-2 Operating Log
CRYOPUMP S/N
CRYO-U
®
OPERATING
LOG
POWER Ｖ×φ
COMPRESSOR S/N
REFRIGERATOR S/N
Measuring condition Compressor unit
Cryopump
Remarks
Temperature Pressure
Date Time
Measurer
Room temp.【℃】 Humidity
︻
%
︼
ETM
Hi
g
h
pressure
h
e
li
um
gas
︻
MPaG
︼
Current【Ａ】
Cooling water
flow rate
︻
L/min(*)
︼
1
st
stage 2
nd
stage
【Pa】
K thermocouple
MBS-C H
2
VP etc
(*) Measure cooling water flow rate with flow meters for each compressor unit.