Inspection
2-2 ULVAC CRYOGENICS INCORPORATED
2.2 Compressor Unit
Check the static helium gas pressure with the pressure gauge on the front panel.
The normal pressure is 1.2±0.04 MPaG
at room temperature (20℃).
The pressure slightly varies depending on the room temperature. See Figure 3-4.
If the room temperature is 20±10℃ and the pressure is 1.16 MPaG
or less, add
helium gas as directed in the instruction manual, section 6.3. If the pressure doesn’t
reach the normal level after the procedure, please contact our Service Engineering
Division or the nearest Customer Support Center.
.
2.3 Connecting Piping (Flexible Hoses)
・Do not forcibly bend the flexible hose less than the minimum radius (250mm) or in
a way that may damage the hose.
・Do not twist the connection of the flexible hose.
・Handle the hose with care and read Appendix C before use.
CAUTION
Check the flexible hose to ensure that there is no twist or break.
Leave the dust cap or plug as it is fixed when the flexible hose is not connected to
the compressor unit and the cryopump.
2.4 Cables
Check the cables to ensure that they are intact.
If you find any missing parts or damages of the product, please contact our Service
Engineering Division or the nearest Customer Support Center.
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