Compressor Unit Instruction Manual
Table 1-2 Components Descriptions
Item Description
TEMP Display
It displays the temperature of the selected refrigerator (cold head) that COLD
HEAD Display indicates as CH number.
Display range ：45〜400K
Display contents：45 (flash) （less than 40K）
45 （40〜45K）
Normal display (45〜400K）
400 （400〜405K）
HHHH （405〜500K）
HHHH (flash) (over 500K or failure)
- - - - （parameter is OFF）
COLD HEAD
Display
It indicates the selected refrigerator (cold head) number (CH1〜CH8).
【How to switch the CH number】
Automatic: It changes every four seconds automatically.
Manual: Press UP or DN key.
ALARM Display
It indicates alarm code when the alarm activates. (*1)
AUTO/MANUAL
Lamp
When AUTO lamp lights on, COLD HEAD Display indicates different CH number
automatically every four seconds. When MANUAL lamp lights on, you can change
the indicated CH number by pressing UP or DN key.
【How to switch AUTO/MANUAL】
Press UP or DN key until AUTO or MANUAL lamp lights on.
LOCAL Lamp LOCAL lamp lights on when REMOTE/LOCAL switch is in the LOCAL position.
READY Lamp
It indicates operational status of each super trap or cryopump.
Display contents：Light off（Not operating）
Flashing （Cooling down）
Light on（READY for pumping (cool down completed)）
CH ON/OFF
Lamp
It indicates parameter setting of each super trap or cryopump.
Display contents：Light off（Parameter is OFF）
Flashing （ALARM activated）
Light on（Parameter is ON）
(*1) Refer to Table 4-2, 4-4 for descriptions of ALARM code.
ULVAC CRYOGENICS INCORPORATED 1-9
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