Ulvac C30PZ - REMOTE;RESPONSE Description

Appendix B Control
1.REMOTE/RESPONSE (for Customer’s sequence signals)
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When performing REMOTE operation, set the LOCAL/REMOTE switch on the rear panel in
REMOTE position.
Table B-1 REMOTE/RESPONSE Description
REMOTE RESPONSE
Pin
No.
Signal Type Signal Form
Pin
No.
Signal Type  Signal Form
1 COMP ON
PHOTO-COUPLER
INPUT（*1）
14 COMP ON ANS
Tr OUTPUT
(PHOTO-COUPLER)
max.100mA
2 CH1 ON 39 CH1 ON ANS
3 CH2 ON 15 CH2 ON ANS
4 CH3 ON 40 CH3 ON ANS
5 CH4 ON 16 CH4 ON ANS
6 CH5 ON 41 CH5 ON ANS
7 CH6 ON 17 CH6 ON ANS
8 CH7 ON 45 CH7 ON ANS
9 CH8 ON 21 CH8 ON ANS
26 COMP OFF 42 READY No.1
27 CH1 OFF 18 READY No.2
28 CH2 OFF 43 READY No.3
29 CH3 OFF 19 READY No.4
30 CH4 OFF 44 READY No.5
31 CH5 OFF 20 READY No.6
32 CH6 OFF 46 READY No.7
33 CH7 OFF 22 READY No.8
34 CH8 OFF 25 COM(-24V)
24 COM(+24V) 50 COM(-24V)
48 COM(+24V)
49 COM(+24V)
（*1）When the DIP switch No.3 is ON (i.e. alternate mode), the C30PZ can be operated by
COMP ON and CH1 ON〜CH8 ON(Pin No.1〜9) signals. In this case COMP OFF and
CH1 OFF〜CH8 OFF(Pin No.26〜34)signals should not be used for the operation.
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B-2 ULVAC CRYOGENICS INCORPORATED 