Ulvac C30PZ - Introduction

Compressor Unit Instruction Manual
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1. COMPRESSOR DESCRIPTION
1.1 Introduction ............................................................................................. 1-1
1.2 Specifications .......................................................................................... 1-2
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1.1 Introduction
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The compressor unit compresses returned helium gas from the refrigerator unit (cold
head) and feeds it back to the refrigerator unit as a high-pressure helium gas.
This compressor unit consists of:
1) a compressor, 2) a cooling system, 3) an oil separation system and 4) an adsorber.
An electric controller is installed to operate a compressor and a refrigerator.
In addition, a control box in which electric control devices required for operating the
compressor unit and the refrigerator unit is attached.
The standard specifications of the compressor unit is described in Table 1-1, the
external dimensions of the C30PZ is in Figure 1-1, parts names are in Figure 1-2, and
functions of the parts in Table1-2.
The C30PZ does not have a feature of resuming operation after momentary power
outage (*1).
In an event of a momentary power outage, the compressor unit shuts down the
compressor motor, and sends a power source alarm (*2). To resume operation, release
the alarm and send start-up signal.
The C30PZ does not meet SEMI-F47.
(*1) This refers to a feature that makes the compressor unit return to operation without
sending start-up signal when a momentary power outage (on all phases) takes
place.
(*2) Alarms related to power source are E-02 and E-10. Refer to the Table 4-3 in
Section 4.
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