Ulvac C30HVRT - User Manual

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COMPRESSOR UNIT

Instruction Manual

C30HVRT

Export Control Policy

Vacuum pumps that pump nitrogen gas at pumping

speed of 15000L/S or more fall under row 2(35) of

appended table 1 of Japan’s Export Trade Control Order,

which is based on international export control regimes.

Customers must follow all related rules and regulations

such as Foreign Exchange and Foreign Trade Act and

take appropriate procedures when exporting or

re-exporting those products.

D/N.MD30HXRE, 2016NR03 ULVAC CRYOGENICS INCORPORATED

Main Page

Table of Contents11
Compressor Unit Safety Instructions15
Disposal Considerations19
C30Hvrt_Compressor Description21
Introduction21
Terminology21
Cryocooler System Documents21
Roles of Compressor in Cryocooler System21
Compressor Specifications22
Figure 1-1 C30HVRT External View22
Table 1-3 Cooling Water Requirements24
Table 1-4 Table24
Component Descriptions25
Figure 1-5 Anchor Bolts Mounting Positions (Example)27
Section 2 Considerations before Installation32
Wiring Requirements32
Table 2-1 Input Power Cable Specifications32
Cooling Water Requirements33
Table 2-3 Table34
Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, and Water Pressure Loss35
Length of Cables and Flexible Hoses36
Remote Functions36
Table 2-5 Remote Interface Specifications36
Figure 2-6 Figure 2-6 Timing Chart for Alternate Operating Mode40
Figure 2-7 Timing Chart for Momentary Operating Mode40
Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode41
Figure 2-9 Signal Delay When the Time Period from a Stop to a Restart Is Short41
Figure 2-10 Timing Chart of C30HVRT When a Short Power Interruption Occurs42
Section 3 Unpacking, Inspection and Storage43
Compressor Carton43
Shipping Inspection43
Figure 3 1 Appearance of a Compressor Carton43
Unpacking44
Carton Contents45
Figure 3 2 Remove Cardboard and Insert Forks Underneath the Compressor45
Table 3-1 Carton Contents45
Inspection of the Compressor and Accessories46
Flexible Hoses and Specifications46
Table 3-2 Flexible Hose Specifications46
Figure 4-1 Installation Procedure49
Installation, Piping, and Wiring50
Connecting Cooling Water Piping50
Connecting and Disconnecting Helium Flexible Hoses50
Figure 4-2 Tighten with Hands First51
Cryocooler Connections52
Electrical Connections53
Figure 4-9 Connector Parts Descriptions56
Figure 4-10 Cut Length of Insulation Coating56
Figure 4-11 Fix with Set Screw57
Wire Rooting for Compressor and Other Equipments58
Operation59
Verification of Helium Static Pressure59
Compressor Operation60
Figure 5-4 Status Display During Operation62
Table 5-1 Supply Line Helium Pressure During Operation62
Inspection after Replacing Helium Circulation Components63
Precautions for When Compressor Is Not in Operation63
Maintenance Operation for a Compressor Stopped for a Long Period63
Section 6 Wiring and Piping Removal and Storage65
Removal of Wiring and Piping and Displacement of Compressor65
Maintenance in Storage65
Section 7 Maintenance69
Scheduled Maintenance69
Replacement of Adsorber69
Table 7-1 Scheduled Maintenance69
Figure 7-1 Remove Two Nuts from the Helium Gas Connectors71
Figure 7-2 Remove All Seven Screws from the Rear Panel71
Figure 7-3 Remove Self-Sealing Coupling71
Figure 7-4 Remove the Rear Panel71
Figure 7-5 Connecting and Disconnecting Self-Sealing Coupling with Two Spanners72
Figure 7-6 Remove the Bolt72
Figure 7-7 Slide out Adsorber Bottle72
Adjusting System Helium Pressure73
Figure 7-8 Locations of Front Panel Screws and Components Inside the Compressor75
Table 7-2 Preparation for Adding Helium Gas75
Figure 7-9 Items for Adding Helium Gas to the Compressor76
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring78
Maintenance Parts78
Table 7-3 Maintenance Parts78
Troubleshooting79
Problem Types79
Troubleshooting Procedures80
Alarm Code Descriptions82
Appendix A Operating Log85
Appendix C C30HVRT Schematic Diagram87
Table C-1 Setting and Connections of Controller87
Figure C-1 C30HVRT Schematic Diagram88
Appendix D C30HVRT Compressor Flow Diagram89

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Ulvac C30HVRT Specifications

General

Brand	Ulvac
Model	C30HVRT
Category	Air Compressor
Language	English

Ulvac C30HVRT - User Manual

Table of Contents

Ulvac C30HVRT Specifications