C30HVRT Compressor Instruction Manual
Water
ressure loss
MPa
Figure 2-3 Cooling water flow rate, water supply temperature, and water
pressure loss
Temperature upper limit
Temperature Lower Limit
Water flow rate
L/min.
Water flow rate
L/min.
(3) 0.06MPa
(2) > 9L/min
Flow
rate
upper
limit
Flow rate lower limit
Operating water
temperature
range
Acce
table
(1)When water temperature is at 30℃
Water supply temperature [℃]
(See ATTENTION
above)
tem
erature
ULVAC CRYOGENICS INCORPORATED 2-5