C30HVRT Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 4-5
Figure 4-5 Connections of the compressor and the cryocooler
4.5 Electrical connections
Refer to “Single cryopump installation” in previous page to connect the cryocooler cable.
Below are the connecting procedures of input power cable and remote input/output cable.
The electrical wiring must be done in accordance with all applicable local, national, and
international standards. Failure to observe this warning may result in damage to and/or
break down of the equipments.
CAUTION
WARNING
There is a danger of high voltage. Ensure that the input power source is OFF and locked
before connecting or disconnecting input power cable. The wiring work must be undertaken
only by an authorized electrician familiar with the structure and the risk of this equipment.
Failure to observe this warning may result in severe bodily injury or fatal accident.
HELIUM SUPPLY FLEXIBLE HOSE
HELIUM RETURN FLEXIBLE HOSE
CRYOCOOLER POWER CABLE
RETURN GAS
SUPPLY GAS
SUPPLY
COOLING WATER
IN
OUT
NO.1
RETURN
To Next Page
Loading...