Ulvac C30HVRT - Figure 5-4 Status Display During Operation; Table 5-1 Supply Line Helium Pressure During Operation

Section 5 Operation
5-4
ULVAC CRYOGENICS INCORPORATED
（４） Operation
Start operation of the compressor by remote
function. Refer to “Section 2.5 Remote
functions” for operation method by remote
e appropriate indicator for cryocooler wh
C30HVRT.)
function.
（５） Operation status display
Figure 5-4 shows a status display during
operation. While the compressor is in
operation, RUN indicator lights up as well as
th ich
is in operation (CH1 indicator for
（６） Cryocooler operation
The cryocooler operation can be started after pum
13Pa by a roughing pump (refer to cryocoo
operates continuously throughout the cryo process.
ping down the cryo-chamber below
ler manual for details). The compressor
（７） Recording the helium pressure during operation
Helium high-pressure side pressure gauge on the front panel indicates the pressure of the
helium supply line of the compressor.
Read the maximum pressure value at the time of starting the compressor operation.
Keep the cryopump system operating and read the pressure value of helium pressure
gauge when the system is pumping steadily.
Write down these values in the Appendix A Table A-1, operating log sheet.
These two recorded values depend on the length of flexible hoses and a kind of the
cryocooler mounted on the cryopump system. The recorded values are used as reference
value for maintenance or replacement of the product explained in the following .
For reference, the helium pressure during operation of C30HVRT (with a cryocooler
UR4K10) with 3m flexible hoses is shown in Table 5-1.
Table 5-1 Supply line helium pressure during operation
C30HVRT
＋RSC40T Cryocooler
Quantity of cryocooler 1
Helium Pressure at Start-up [MPaG] 2.3 or lower
Helium pressure at cryogenic temperature [MPaG] 1.8 – 1.9
(Remarks)
1. Length of helium flexible hose : Standard ( 3m )
2. Room Temperature : 20℃
Figure 5-4 Status display during operation
The compressor is intended for continuous, not intermittent operation. The number of
st rting/stopping of the compressor pump must be six or less times per hour. Failure to
observe this warning may result in damage to and/or life shortening of the compressor.
CAUTION
a