Section 5 Operation
5-2
ULVAC CRYOGENICS INCORPORATED
5.2 Compressor operation
（１） Supply water to the cooling water piping
Supply water to the cooling water piping. After supplying cooling water, check that the
water flow rate and the pressure are in the proper range (See “Section 2.3 Cooling water
requirements”).
（２） Power-On the compressor
Ensure that the compressor input power cable is connected to the INPUT POWER
receptacle. Then turn on the breaker for the compressor inside the distribution panel at the
equipment side.
The circuit protector in the compressor chassis is normally turned on; therefore the
compressor will be powered on immediately by switching a power supply on the equipment
side.
（３）Inspection of phase and voltage of an input power supply
If PWR LED and RDY LED indicators light up after a few seconds from power-on, the
compressor is ready for operation (See Figure 5-2.) Although the figure shows the example
Helium filling
pressure (static)
[MPaG]
Temperature [℃]
Figure 5-1 Helium static pressure and ambient temperature
Power-On procedure and checking the main power phase sequence must be undertaken by
an authorized electrician familiar with the construction and risk of this equipment.
Failure to observe this warning may result in severe bodily injury or fatal accident.
CAUTION
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