Section 3 0BUnpacking, Inspection and Storage
3-4
ULVAC CRYOGENICS INCORPORATED
3.5 Inspection of the Compressor and Accessories
Compressor
Inspect and visually confirm that there is no evidence of damage, oil leak and/or helium
gas leakage to the compressor. If there is a problem, please contact our Service
Engineering Division or the nearest customer support center.
Also check the value of helium pressure gauge on the front panel of the compressor to
confirm that there is no helium gas leakage (Refer to “Section 5.1 Verification of helium
static pressure”).
Helium pressure gauge
If the value of the helium pressure gauge indicates lower than -0.04MPaG, the lowest
appropriate charge pressure shown in figure 5-1, adding helium gas is required. For the
procedures of adding helium gas refer to “Section5 Operation”.
Please contact our Service Engineering Division or the nearest customer support center if
the helium static pressure is significantly low.
Accessories
Inspect and visually confirm the accessories that there is no evidence of damage
If any damage is found, please contact our Service Engineering Division or the nearest
customer support center.
3.6 Flexible Hoses and Specifications
Flexible hose (Helium flexible line) consists of helium gas filled flexible hose, and
self-sealing couplings at both ends.
Listed below are the specifications of flexible hoses.
Table 3-2 Flexible hose specifications
Item Specification
Helium gas 99.999% pure or more
Allowable helium pressure Max.2.45MPaG
Maximum operating temperature 70°C
Material SUS304
Standard length 3m
Minimum bending radius 250mm
Coupling 1/2inch self-sealing coupling
Tightening torque of coupling
20N･m
Minimum bend radius of the flexible hose is 250mm.
Do not twist the flexible hose especially at both ends. Also, when bending the flexible hose
ensure that no part of it becomes flattened.
Do not put any objects se.
Leave the dust caps on th ling couplings of the compressor until the flexible hoses
are connected to the couplings.
Failure to observe this warning may result in damage and/or break down of the equipment.
on the flexible ho
e self-sea
CAUTION
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