Ulvac C30HVRT - Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring; Maintenance Parts; Table 7-3 Maintenance Parts

Section 7 Maintenance
7-10
ULVAC CRYOGENICS INCORPORATED
7.4 Regular Maintenance of Helium Lines, Cooling Water Piping and
Electrical Wiring
Conduct inspection on helium lines, cooling water piping and electrical wiring every 12000
hours.
Inspect connection parts of helium lines and cooling water piping for evidence of leakage.
Also check that there is no damage in these plumbing. ese plumbing.
Following procedure must be undertaken by authorized electrician and mechanical
personnel familiar with the construction and risk of this equipment. Failure to observe this
WARNING
warning may result in severe bodily injury or fatal accident.
For electrical wiring, check the cold head drive cable of the compressor and remote
mpressor as well.
For electrical wiring, check the cold head drive cable of the compressor and remote
input-output cable to ensure that they are connected firmly. At the inspection, turn off
the compressor unit by turning OFF the breaker on the distribution panel at the equipment
side. Disconnect power cable from the compressor as well.
input-output cable to ensure that they are connected firmly. At the inspection, turn off
the compressor unit by turning OFF the breaker on the distribution panel at the equipment
side. Disconnect power cable from the co
7.5 Maintenance Parts 7.5 Maintenance Parts
Table 7-3 shows parts that need replacement during maintenance. Replace them when
needed referring the replacing cycle in the table.
Table 7-3 shows parts that need replacement during maintenance. Replace them when
needed referring the replacing cycle in the table.
Table 7-3 Maintenance Parts Table 7-3 Maintenance Parts
Parts and Devices Parts and Devices Type
(*1)
Type
(*1)
Replacement cycle Replacement cycle
Adsorber S Shorter than 24000h
Gasket for Helium Coupling U When scratch or dirt is detected
(*1)
Maintenance Cycle
S: Scheduled U: Unscheduled
NOTE: For more information on planning maintenance, purchasing maintenance parts,
diagnosis, and servicing, please contact our Service Engineering Division or the nearest
customer support center.