Ulvac C30HVRT - Appendix A Operating Log

Appendix A Operating Log
ULVAC CRYOGENICS INCORPORATED A-1
Appendix A Operating log
Table A-1 Operating log
COMPRESSOR S/N
CRYOCOOLER
OPERATING LOG
POWER Ｖ×
φ
REFRIGERATOR S/N
Measuring condition
Compressor unit
Cryocooler
Remarks
Temperature
Date
Time
Measurer
Room temp.
Humidity
ETM
High
pressure
helium gas
MPaG
Current
A
Cooling
water
flow rate
L/min(*)
K
(*) Measure cooling water flow rate with flow meters for each compressor unit.
%
℃