Ulvac C30HVRT - Section 7 Maintenance; Scheduled Maintenance; Replacement of Adsorber; Table 7-1 Scheduled Maintenance

C30HVRT Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED
7-1
Section 7 Maintenance
7.1
Scheduled Maintenance ....................................................................... 7-1
7.2 Replacement of Adsorber ..................................................................... 7-1
7.3 Adjusting System Helium Pressure ...................................................... 7-5
7.4 Regular Maintenance of Helium Lines, Cooling Water
Piping and Electrical Wiring ................................................................ 7-10
7.5 Maintenance Parts .............................................................................. 7-10
7.1 Scheduled Maintenance
The table below shows the required maintenance on the cryopump system. Refer to the
following paragraph for details of adsorber replacement.
For maintenance of refrigerator or other components of the cryopump, see cryopump
instruction manual.
Table 7-1 Scheduled maintenance
Item Maintenance Cycle (h)
Adsorber replacement Max. 24000h
Refrigerator maintenance
Refer to the instruction manual of
refrigerator unit.
Inspection of Piping and
Wiring.
12000h
NOTE: If a special maintenance plan for your specific application is needed please consult
with our Service Engineering Division or the nearest customer support center.
NOTE: Refer to “Section 9 Disposal of equipment and component parts” for disposing used
components.
7.2 Replacement of Adsorber
Neglecting the scheduled maintenance may shorten the product life, cause damage, and/or
destruction of the cryopump system.
CAUTION
The following replacing procedure must be undertaken by authorized personnel familiar with
the structure and risk of the product. Failure to observe this warning may result in severe
CAUTION
bodily injury or fatal accident.