Appendix D C30HVRT Compressor Flow Diagram
ULVAC CRYOGENICS INCORPORATED D-1
Appendix D C30HVRT Compressor Flow Diagram
Low pressure helium gas returning from the cryocooler enters the compressor.
Lubricant oil is injected into the compressor with the low pressure helium; the gas
containing the oil is then compressed by the compressor pump turning it into high
temperature high pressure helium gas. Most of the lubricant oil returns to droplet form
and is separated within the compressor. This lubricant oil is pooled at the bottom and
lubricates the inside of the compressor. It follows the circulating system where it comes
out from the compressor and cooled down at an oil heat exchanger before being injected
back into the compressor through an oil injection filter.
High temperature high pressure helium gas comes out from the compressor, passes
through a water cooled helium heat exchanger for removal of compression-caused heat.
It is cooled to an ambient temperature and then enters an oil separator. In here, the oil is
separated and the droplets of separated oil pass thorough an oil return filter and oil
return orifice before joining the low pressure helium gas and being returned to the
compressor. High pressure helium gas comes out from the oil separator enters an
adsorber where oil-mist is adsorbed and removed. The Helium gas comes out the
adsorber passes through a flexible hose and is supplied to the cryocooler.
◆Compressor safety devices
Located on the helium supply line and
releases gas automatically when pressure
exceeds the set value.
Differential
pressure
regulating valve
Located on the line connecting helium
supply and return lines and automatically
keeps the high – low differential pressure
under the set value.
※1 The set pressure of safety valve at the cryocooler is 1.9MPaG. Please note that the
cryocooler safety valve releases gas before the compressor safety valve in actual system.
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