Ulvac C30HVRT - Page 90

C30HVRT Compressor Installation, Operation, Maintenance and Troubleshooting
D-2 ULVAC CRYOGENICS INCORPORATED
Figure D-1 Compressor flow diagram
Helium heat exchanger
P
TS1
SUPPLY
Oil separator
Adsorber
ﾞ
Oil return filter
Oil return orifice
S
Solenoid valve
for pressure
equalization
Oil injection
filter
LPS
TS2
Differential pressure
regulating valve
Compressor
pump
OUT
TS3
Oil heat changer
Accumulator
RETURN
Low pressure switch
Helium filling valve
Pressure gauge
Safety valve
Cooling water
IN
Helium gas flow
Helium gas and oil flow
Oil flow
Cooling water flow