C30HVRT Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED
6-1
Section 6 Wiring and Piping Removal and Storage
6.1
Removal of wiring and piping and displacement of compressor ................. 6-1
6.2 Maintenance in storage ............................................................................... 6-2
6.1 Removal of wiring and piping and displacement of compressor
It is necessary to remove the cooling water piping, helium lines, and electrical wiring
before changing the compressor installation place or removing the system.
Before starting removing work, ensure that the breaker for the compressor inside the
distribution panel at the equipment side is OFF and lock it in the OFF position.
6.1.1 Removal of cooling water piping
Stop supplying cooling water to the compressor.
Drain water out from the compressor before removing the cooling water piping.
Also, other than the purpose for removing the cooling water piping, drain water out from
the compressor under the conditions listed below.
[Cooling water freezing]: When there is a danger of bursting cooling water piping due
to freezing of the cooling water in the compressor.
[Long term halt]: When the cryopump system is stopped for more than a week for
holidays or other reasons.
[Transfer]: When relocating the compressor.
(Cooling water draining procedure)
The following procedure is available only for an open loop type cooling-water supply
system where the water outlet is opened to the atmosphere.
For close loop type cooling-water supply system, it is recommended to additionally install
a water drain line diverged from the water return line on the equipment in order to release
water pressure in the compressor.
Just after the operation has been stopped, some parts in the compressor chassis may be
hot. Wait at least 15 minutes until it cools down to conduct the work safely. Failure to
WARNING
observe th warning may result in severe bodily injury. is
The following procedure must be undertaken by an authorized electrician and mechanical
personnel familiar with the structure and risk of the product. Failure to observe this warning
WARNING
may result in severe bodily injury or fatal accident.
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