C30HVRT Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED
7-5
13. Put the two removed nuts back on to the “SUPPLY GAS” and “RETURN GAS”
connectors at the rear panel of the compressor and tighten each nut using the two
spanners.
14. Connect the flexible hoses to the “SUPPLY GAS” and “RETURN GAS” connectors at
the rear panel of the compressor. Refer to “Section4.3 Connecting and disconnecting
helium flexible hoses” for connecting method.
15. Check the helium static pressure. Refer to “Section 5.1 Verification of helium static
pressure”.
If the pressure is higher or lower than it should be, adjust it referring to the following
“Section6.3 Adjusting system helium pressure”.
16. Record the date and accumulated operation time when the adsorber was replaced in
the adsorber replacement record label on the front panel of the compressor.
As a guide for the next replacement, it is recommended to make a note of the value that
the current accumulated operation time added to the adsorber replacement cycle hours
in Table 7-1.
Refer to “Section 8 Disposal of equipment and component parts” for disposing of used
adsorber.
7.3 Adjusting System Helium Pressure
System helium pressure must be adjusted when the compressor is not in operation.
Refer to “Section 5.1 Verification of helium static pressure” for appropriate pressure value
when the compressor is not in operation.
Appropriate pressure value while the compressor is in operation is the value recorded at
“Section 5.2 Compressor operation, (7) Recording the helium pressure during the
operation”.
If the pressure has changed by more than 0.04MPaG from the listed value, follow the
procedure below and adjust the system pressure.
All helium circulation components must be connected when adjusting the pressure of the
cryopump system.
CAUTION
Following procedure must be undertaken by authorized electrician and mechanical
G
personnel familiar with the construction and risk of this equipment. Failure to observe this
warning may result in severe bodily injury or fatal accident.
WARNIN
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