C30HVRT Compressor Unit Instruction Manual
Loosen six screws
and remove the
front panel.
Figure 7-8 Locations of Front Panel Screws and Components inside the
Compressor
(2) Raising Helium Pressure
When the helium pressure gauge reads a value lower than the appropriate value, adding
helium gas is required.
When charging helium or performing helium circuit decontamination, equipments
(regulators, charging hoses, adopters, etc.) that can be used at 2.0MPaG or above are
required.
Table 7-2 shows items and devices required for adding helium gas.
Table 7-2 Preparation for Adding Helium Gas
Item Specification
Helium bottle 99.999% pure or above
Pressure regulator For Helium gas (left-hand screw), 0-20MPaG / 0-6MPaG
Helium charging hose Terminating in a 1/4 inch female flare fitting
Helium pressure gauge
(Upper view)
Knob of the Helium
charge control valve
Helium charge fitting
ULVAC CRYOGENICS INCORPORATED
7-7