C30HVRT Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED
5-5
5.3 Inspection after replacing helium circulation components
After replacing a component such as a cryocooler, a flexible hose, and a compressor refer
to “Section 5.1 Verification of helium static pressure” and check that the helium filling
pressure is almost equal to the value before replacing the component.
In addition, if the system installation condition has been changed, conduct “Recording the
helium pressure during the operation” described above.
5.4 Precautions for when compressor is not in operation
If the temperature of cooling water supplied to the compressor is less than 10℃, stop the
water supply after the compressor has been stopped. If cooling water of temperature below
10℃ is supplied continuously it may increase viscosity of lubricant oil and cause start up
failure of the compressor when the operation command is sent.
Also, if the compressor will be stopped for long period, it is recommended to stop
supplying cooling water to avoid corrosion or clogging of the pipes inside the compressor
and the heat exchanger. In addition remove the water from the compressor when needed
(Refer to “Section 6.1.1 Removal of cooling water piping” to remove the water from the
compressor).
5.5 Maintenance operation for a compressor stopped for a long period
NOTE: Circulate cooling water as well during the maintenance operation of the compressor.
When the cryocooler system is stopped for a long period, operate the compressor for an
hour every three months. This will supply lubricant oil inside the compressor to all the
components inside. Also, operate the cryocooler for ten minutes at a time every six
months.
Failure to obser tion may result in damage to the compressor when
restarting operation.
CAUTION
ve this precau
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