Ulvac C30HVRT - Figure 7-5 Connecting and Disconnecting Self-Sealing Coupling with Two Spanners; Figure 7-6 Remove the Bolt; Figure 7-7 Slide out Adsorber Bottle

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Section 7 Maintenance

Figure 7-5 Connecting and Disconnecting Self-Sealing Coupling with Two Spanners

TURN with 30mm spanner

HOLD with 26mm spanner

(Self-sealing coupling)

Clockwise: Tightening

Counter Clockwise: Loosening

Adsorber

Flexible hose

Figure 7-7 Slide out Adsorber Bottle

Figure 7-6 Remove the Bolt

9. Install the replacement adsorber. Remove the two dust caps from the replacement

adsorber. Put the adsorber into the compressor so as to place it at the mounting tab on

the base of the compressor. Secure the adsorber with the mounting bolt temporally.

10. Connect self-sealing coupling to the adsorber with the two spanners. Tighten the

coupling referring to Figure 7-5. Recommended tightening torque is 20N･m. Connect

the coupling quickly to minimize helium leakage.

11. Put the rear panel back on the compressor to align the helium connector of the

adsorber with the hole of the rear panel and then remove the rear panel again. Fix the

adsorber mounting bolt firmly this time.

12. Replace the rear panel and secure it by tightening the seven screws.

7-4

ULVAC CRYOGENICS INCORPORATED