Ulvac C30HVRT - Figure C-1 C30 HVRT Schematic Diagram

C30HVRT Installation, Operation, Maintenance, and Troubleshooting
C-2 ULVAC CRYOGENICS INCORPORATED
Figure C-1 C30HVRT schematic diagram
UL1015 #10
YW/GN
Magnetic Valve
UL1015 #10
COMPRESSOR
COMPRESSOR COMPRESSOR COMPRESSOR
CN5
REMOTE RESPONSE
TS1 TS2
CN6 CONNECTOR
LPS TS3
INPUT POWER
TB1
V
VR3
V
VR1
V
VR2
POWER
COLD HEAD
Cold Head No.1
No.1
TB3
WVU
COMPRESSOR MOTER
M
UL1007 #24 UL1007 #24 UL1007 #24
２１ ２１
ＣＮ1
13 14 96 44 95 43
OL1
E5
E5
YW/GN
UL1007 #18
BK WT RD
1071 2 3 4
YW/GN
4 3 2 1
16 11 12 13 15 14
9 8 7
RD
UL1015 #24
×2
UL1007 #16YW/GN
1 2 3 4
FG BAR
BK
WT
RD
UL1007 #18
4 2
RD
WT
BK BK
WT
RD
BK
WT
RD
AC200V 3 φ
8 965
FG
YW/GNUL1007 #16
GN
YW/GN
UL1007 #18
BK
RD
BE YW YW YW BE BE BE YW
E4
BK
RD
ETSR
TB2
UL1015 #14
YW BE BE YW BE YW BE YW YW BE
UL1007 #18
UL1007 #18
UL1007 #24
UL1007 #24
BK BK RD RD
UL1007 #18
UL1007 #18
YW/GNBKWTRD
UL1015 #10
UL1015 #10
UL1007 #18
UL1007 #24 UL1007 #24
UL1007 #18
UL1007 #18
UL1007 #20
YW BE YW BE YW BE YW BE BE YW BK BK RD BK RD
YW/GN
BK BK RD RD
BKWTRD
RD BK BK WT RD
YW/GN
WT BK
BK
WT
RD
RD WT BK
BKWTRD
5 3 4 2 1
5
E1
CP2
A2 A1
CR
MV1
MV2
MV1MV2
4321
13 14
1211109
8765
LOAD
LINE
COM
NO
RY1
E4E1
MC
CP1
CN1
CN2
TB1
HOUR METER
CPU BOARD
RELAY BOARD
PS1
2 4 5 3 7 6 9 8
12 11 14 13 16 15 10
1
10
2 5 4 7 6 9 8 3 1
CN5
2
1
CN2
4 3 1 2
CN1
1 3
1
CN1
3 2 6 5 4
431 2
1
CN3
3 2 4
CN9
1 2 4 3
CN3
2 3 5 4 1 7 8 9 6
CN8
1 3 2 6 5 4 1
CN7
4 3 6 5 9 8
11 10
7 2
15 16 13 14 18 19 20 17 12
1
CN4
4 3 6 5 8 7 2 1
CN6
4 3 5 6 2
Board mounting hole(TH)
ALARM Output
ON Command OFF Command
Operation answer back output
C20 mode
ON/OFF Command
26 pin flat cable
Board mounting hole(TH)
Male side
Female side