Ulvac C30HVRT - Figure 7-9 Items for Adding Helium Gas to the Compressor

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Section 7 Maintenance

7-8

ULVAC CRYOGENICS INCORPORATED

NOTE: If you need a pressure regulator and/or helium charging hose described in Table

7-2 for adding helium gas, please contact our Service Engineering Division or the nearest

customer support center.

Figure 7-9 Items for Adding Helium Gas to the Compressor

The purity of helium gas to be charged must be above 99.999%. If the purity is lower, it

may result in deterioration of the cryopump system or performance degradation.

CAUTION

If the helium pressure of the cryopump system becomes 0, there is a risk that air or

moisture in the air invade into the system and contaminate helium. In such a case,

please contact our Service Engineering Division or the nearest customer support center.

CAUTION

fitting (connect this

side to the

Pressure regulator handle

4 inch female flare

Pressure

regulator

Helium bottle

Helium

charging hose

Bottle valve

Main Page

Table of Contents11
Compressor Unit Safety Instructions15
Disposal Considerations19
C30Hvrt_Compressor Description21
Introduction21
Terminology21
Cryocooler System Documents21
Roles of Compressor in Cryocooler System21
Compressor Specifications22
Figure 1-1 C30HVRT External View22
Table 1-3 Cooling Water Requirements24
Table 1-4 Table24
Component Descriptions25
Figure 1-5 Anchor Bolts Mounting Positions (Example)27
Section 2 Considerations before Installation32
Wiring Requirements32
Table 2-1 Input Power Cable Specifications32
Cooling Water Requirements33
Table 2-3 Table34
Figure 2-3 Cooling Water Flow Rate, Water Supply Temperature, and Water Pressure Loss35
Length of Cables and Flexible Hoses36
Remote Functions36
Table 2-5 Remote Interface Specifications36
Figure 2-6 Figure 2-6 Timing Chart for Alternate Operating Mode40
Figure 2-7 Timing Chart for Momentary Operating Mode40
Figure 2-8 Signal Delay When Powered On（In Alternate Operating Mode41
Figure 2-9 Signal Delay When the Time Period from a Stop to a Restart Is Short41
Figure 2-10 Timing Chart of C30HVRT When a Short Power Interruption Occurs42
Section 3 Unpacking, Inspection and Storage43
Compressor Carton43
Shipping Inspection43
Figure 3 1 Appearance of a Compressor Carton43
Unpacking44
Carton Contents45
Figure 3 2 Remove Cardboard and Insert Forks Underneath the Compressor45
Table 3-1 Carton Contents45
Inspection of the Compressor and Accessories46
Flexible Hoses and Specifications46
Table 3-2 Flexible Hose Specifications46
Figure 4-1 Installation Procedure49
Installation, Piping, and Wiring50
Connecting Cooling Water Piping50
Connecting and Disconnecting Helium Flexible Hoses50
Figure 4-2 Tighten with Hands First51
Cryocooler Connections52
Electrical Connections53
Figure 4-9 Connector Parts Descriptions56
Figure 4-10 Cut Length of Insulation Coating56
Figure 4-11 Fix with Set Screw57
Wire Rooting for Compressor and Other Equipments58
Operation59
Verification of Helium Static Pressure59
Compressor Operation60
Figure 5-4 Status Display During Operation62
Table 5-1 Supply Line Helium Pressure During Operation62
Inspection after Replacing Helium Circulation Components63
Precautions for When Compressor Is Not in Operation63
Maintenance Operation for a Compressor Stopped for a Long Period63
Section 6 Wiring and Piping Removal and Storage65
Removal of Wiring and Piping and Displacement of Compressor65
Maintenance in Storage65
Section 7 Maintenance69
Scheduled Maintenance69
Replacement of Adsorber69
Table 7-1 Scheduled Maintenance69
Figure 7-1 Remove Two Nuts from the Helium Gas Connectors71
Figure 7-2 Remove All Seven Screws from the Rear Panel71
Figure 7-3 Remove Self-Sealing Coupling71
Figure 7-4 Remove the Rear Panel71
Figure 7-5 Connecting and Disconnecting Self-Sealing Coupling with Two Spanners72
Figure 7-6 Remove the Bolt72
Figure 7-7 Slide out Adsorber Bottle72
Adjusting System Helium Pressure73
Figure 7-8 Locations of Front Panel Screws and Components Inside the Compressor75
Table 7-2 Preparation for Adding Helium Gas75
Figure 7-9 Items for Adding Helium Gas to the Compressor76
Regular Maintenance of Helium Lines, Cooling Water Piping and Electrical Wiring78
Maintenance Parts78
Table 7-3 Maintenance Parts78
Troubleshooting79
Problem Types79
Troubleshooting Procedures80
Alarm Code Descriptions82
Appendix A Operating Log85
Appendix C C30HVRT Schematic Diagram87
Table C-1 Setting and Connections of Controller87
Figure C-1 C30HVRT Schematic Diagram88
Appendix D C30HVRT Compressor Flow Diagram89

Ulvac C30HVRT - Figure 7-9 Items for Adding Helium Gas to the Compressor

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