Compressor Unit Instruction Manual
ULVAC CRYOGENICS INCORPORATED 1-5
Table 1-5 Electromagnetic environment resistance characteristics
Item Specification
Insulation resistance (Between power
supply, Input-output and Ground)
5MΩ and more / 1 min.
(500V megohmmeter)
Dielectric withstanding voltage (Between
power line and ground)
1500V / 1 min.
Noise immunity (Power line) (*1) ±1500V
Noise immunity (Input-output line) (*1) ±500V
(*1)By fast transient/burst method. Test duration : 1 min.
1.6 Component descriptions
This section describes components which need adjustments and/or verifications during
operation and maintenance.
Compressor front view is shown in Figure 1-3 and rear view in Figure 1-4.
⑤CASTERS
④HELIUM FILL FITTING
(inside the panel）
⑥ALARM STATUS TABLE
③ OM PORT C :MONITORING
⑦STATUS DISPLAY and
RESET BUTTON
①ELAPSED TIME METER
②HIGH PRESSURE
HELIUM GAS
PRESSURE GAUGE
FRONT PANEL
Figure 1-3 Compressor front view
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