Operation
Table 4-3 Alarm Codes List
ALARM display ：E−＊＊
The codes are listed in order of priority. An alarm code will be indicated at once when the
compressor is in operation. If the compressor is stopped, the code will be indicated when
the operation signal is input.
Alarm
Codes
Factor Operation Action
E-01 CP2 has tripped. Stop Contact us.
02 AC power wrong connection
(reverse or loss of phase)
Stop Check the power source.
03 Receiving emergency shutdown signal
（unused）
Stop Contact us.
04 TS1 turns OFF. Stop Contact us.
05 TS3 turns OFF. Stop Check cooling water.
06 LPS turns OFF. Stop Check helium static
pressure.
07 CP3 has tripped. Stop Contact us.
08 MC fuse blow-out
(on the COMP CTRL board)
Stop Contact us.
09 TS2 turns OFF. Stop Contact us.
10 Answer from MC is incorrect. Stop Contact us.
91 Compressor motor current exceeds the
setting.
Stop Check parameter 37.
92 Gas supply pressure exceeds the
setting.
Stop Check parameter 35.
93 Gas return pressure reduced below the
setting.
Stop Check parameter 36.
11
CH Fuse blowout detection
(COMPIFB)
*1 *2
Stop only CH1 Contact us.
21 Stop only CH2 Contact us.
31 Stop only CH3 Contact us.
41 Stop only CH4 Contact us.
51 Stop only CH5 Contact us.
61 Stop only CH6 Contact us.
71 Stop only CH7 Contact us.
81 Stop only CH8 Contact us.
4-4 ULVAC CRYOGENICS INCORPORATED
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