Ulvac C30PZ - Page 43

Compressor Unit Instruction Manual
Alarm
Codes
Factor Operation Action
12
When CH is operating, the answer from
relay is incorrect.
*2
Stop only CH1 Contact us.
22 Stop only CH2 Contact us.
32 Stop only CH3 Contact us.
42 Stop only CH4 Contact us.
52 Stop only CH5 Contact us.
62 Stop only CH6 Contact us.
72 Stop only CH7 Contact us.
82 Stop only CH8 Contact us.
13
K thermocouple disconnection
 *1 *2
Stop only CH1 Check K thermocouple.
23 Stop only CH2 Check K thermocouple.
33 Stop only CH3 Check K thermocouple.
43 Stop only CH4 Check K thermocouple.
53 Stop only CH5 Check K thermocouple.
63 Stop only CH6 Check K thermocouple.
73 Stop only CH7 Check K thermocouple.
83 Stop only CH8 Check K thermocouple.
*1： Blowout of CH and K thermocouple will be displayed even when the compressor unit has
been shut off.
*2： When the CH is unavailable by parameter setting, blowout of the CH, answer from relay and
disconnection of K thermocouple will not be detected.
4.3 Pre- operation Check
Before operating the compressor unit, check the following points.
１．Appropriate setting of the ultimate cooling-down temperature.
２．Power source voltage is within the specified range.
３．TEMP and COLD HEAD displays are normal when turning on the compressor.
４．REMOTE/LOCAL switch meets the requirements for use.
５．All connections are tight.
６．Using cooling water that meets the requirements.
７．Helium gas static pressure is within allowable range.

ULVAC CRYOGENICS INCORPORATED   4-5