Compressor Unit Description
Table 1-2 Components Descriptions (Continued)
Item Description
UP Key(*1)
It switches CH number indicated on the COLD HEAD display and a parameter in
parameter setting mode.
ENT Key (*1)
It switches the display to parameter setting mode by long press and sets the
parameter in parameter setting mode.
DN Key
It switches CH number indicated on the COLD HEAD display and a parameter in
parameter setting mode.
COMP Key
When operating in LOCAL mode, it turns ON/OFF the compressor.
*If turns it on within 5 seconds after turns it off, it takes 5 seconds to starts up
again.
The lamp will flash until the compressor starts up.
COLD HEAD Key
・When operating in MANUAL mode
It turns ON/OFF the super trap or the cryopump displayed on COLD HEAD
display. (A CH number of the super trap/cryopump will be displayed.)
・When operating in AUTO mode
It turns ON/OFF all the super traps or the cryopumps that have “CH ON/OFF”
lamps on. However, when multiple super traps or cryopumps are operating, OFF
command prior to ON.
RESET Key
It clears and resets the alarm.
＊REMOTE/RESPONSE and RS-232C communication can not reset the alarm.
REMOTE/
RESPONSE
Connector
It is a connector to:
・input ON/OFF signal for C30PZ and each CH.
・output ON ANS signal for C30PZ and ON ANS and READY signal for each CH.
＊Refer to Figure B-1 and B-2 for details.
FAILURE OUT
Connector
It outputs the alarm signal when the alarm activates.
＊Refer to Figure B-3 for details.
RS-232C
Communication
Connector
It is a connector for control command and status read command by RS-232C
communication.
＊Refer to Appendix B-3 RS-232C for details.
(*1) Hold down the UP key and press the ENT key for 5 seconds to display helium gas supply
pressure (on TEMP display), return pressure(on COLD HEAD display) and current value of
the compressor unit(on ALARM display). While displaying these values, normal display and
the alarm code will be disappeared. To return to normal display, press any key on the
1-10 ULVAC CRYOGENICS INCORPORATED
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