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S-4 ULVAC CRYOGENICS INCORPORATED

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Table of Contents

Table of Contents9
Safety Instructions11
Disposal Consideration15
Introduction17
Specifications18
Figure 1-1 Dimensions21
Components Descriptions25
Inspection29
Compressor Unit29
Shipping List29
Optional Parts29
Cables30
Installation31
Connecting Cooling Water Piping31
Cooling Water32
Recommended Cooling Water for Compressor32
Cooling Water Requirement33
Connecting the Super Trap(Refrigerator Unit) to the Compressor Unit･･･････････････････････････････････････3-535
Connecting Flexible Hose35
Connecting Electrical Cables37
Operation39
Power-On Procedure39
Parameter Settings40
Alarm Codes List42
DIP Switch Functions44
Charging Helium Gas55
Troubleshooting Fault Diagnosis57
Operating Log58
REMOTE/RESPONSE Description60

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