Ulvac C30PZ - Page 19

Compressor Unit Instruction Manual
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ULVAC CRYOGENICS INCORPORATED 1-3
◆Helium Gas Pressure: (Room temperature : 20ºC)
Charge Pressure
(*1)
1.2±0.04 MPaG
Operation Pressure After Cooldown
On SUPPLY side (*2)
1.8 - 2.0 MPaG
(*1)The length of flexible hose: 15m
(*2)The Helium gas pressure may vary depending on the number of Super Trap, the
temperature control and the length of flexible hoses, and it might slightly differ from
the value above.
Ensure that the pressure will not exceed 2.1MPa
G on the high pressure
side
immediately after staring operation.
◆ Compatible Super Trap/Cryopump and Compressor;
CRYO-T8SN-RM(RMS10LG) x 6(*) + CRYO-T6E-RM(RMS10LG) x 2(*)
or
CRYO-T8SN-RM(RMS10LG) x 6(*) + CRYO-U8HLH-RM(RM10) x 1(*)
(*): The figures show the maximum number of units that can be connected to a single
C30PZ compressor unit.
◆ Connector Specifications
CONNECTOR MANUFACTURER TYPE/MODEL
1
IMPUT POWER
（4 documents）
JAE
Unit Side
MS3102A22-22P
Cable Side
MS3106B22-22S
Clamp：MS3057-12A
2
REFRIGERATOR
(COLD HEAD) POWER
（4 pins）
NANABOSHI
Unit Side
NJC-204-RF
Cable Side
NJC-204-PM
3
REMOTE/RESPONSE
Connector
DDK
Unit Side
57F-40500-20S
Cable Side
57F-30500
4
FAILURE OUT
Connector
DDK
Unit Side
57F-40140-20S
Cable Side
57F-30140
5
RS232C
Connector
DDK
Unit Side
17JE-13090-D2(D3A)A
Cable Side
17JE-23090-02(D8A)-CG
※All connectors meet the UL standard.
※No.1, 2: Cables will be attached. Please specify the length of the cables at time of
order.
※No.3〜5: Cables are not attached.
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