Ulvac C30PZ - Page 22

Compressor Unit Description
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1-6  ULVAC CRYOGENICS INCORPORATED 
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Figure 1-2 Components and Locations (1/3)
ＰＲＥＳＳＵＲＥ
ＳＵＰＰＬＹ
MANUAL
HEAD
ARARM
UP ENT
LOCAL
DN
TEMP
COLD
AUTO
K
COLDCOMP RESET
HEAD
5
8
7
6
READY
5
6
7
8
ON
4
3
2
1
STOP
1
2
3
4
OFF
COOL DOWN ALRAM
Model
C30PZ
ＲＥＴＵ ＲＮ ＧＡＳ ＳＵＰ ＬＬＹ ＧＡ ＳＲＥＴＵ ＲＮ ＧＡＳ ＳＵＰ ＬＬＹ ＧＡ Ｓ
ＷＡＴＥＲ ＩＮ
ＷＡＴＥＲ ＯＵＴ
REMOTE/RESPONSEUT
RS232C
CA (TYPE:K)
8+
− 7+ − 6+ − 5+ − 4 − 2+ − 1+
CA (
FAILER O
+3+
−−
TYPE:K)
COLD HEAD POWER
8765321 4
INPUT POWER
LOCAL
REMOTE
【Front】
【Side】
Elapsed Time
Meter
Controller
Control Panel
Helium Suppy
Pressure Gauge
【Rear】
HeChargeValve
(Located at the back
of the panel.)
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Helium Gas SUPPLY
Connector
Helium Gas RETURN
Connector
Cooling Water Inlet
（Rc3／8）
Cooling Water Outlet
（Rc3／8）