Ulvac C30PZ - Page 38

Installation
ＲＥＴ ＵＲ Ｎ ＧＡ Ｓ Ｓ ＵＰＬＬ Ｙ Ｇ ＡＳＲＥＴ ＵＲ Ｎ ＧＡ Ｓ Ｓ ＵＰＬＬ Ｙ Ｇ ＡＳ
ＷＡＴＥＲ ＩＮ
ＷＡＴＥＲ ＯＵＴ
REMOTE/RESPONSEFAILER OUT
RS232C
CA (TYPE:K)
8+
− 7+ − 6+ − 5+ − 4+ − 3+ − 2+ −− 1+
CA (TYPE:K)
COLD HEAD POWER
87654321
INPUT POWER
LOCAL
REMOTE
−
IN
OUT
Cooling
Water Line
Connecting Piping
(Flexible Hoses)
(
RETURN
)
(
SUPPLY
)
Refrigerator
Power Cable
K thermocou
p
le
Red
Power Source
Figure 3-5
C30PZ Connections
3-8  ULVAC CRYOGENICS INCORPORATED 