YK15-0009-DI-002-04
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3.2 Lubrication
Remove oil filling plug, and fill the Pump with oil until oil level should be between the two level
lines (MAX and MIN on the Pump case) on the oil level gauge.
When the oil level is between the two level lines, the Pump is allowed to start.
Fig. 14 Lubrication and oil level indication
CAUTION
①
Read “1. 2 Chemical Material Safety Data Sheet” previously before
starting lubrication.
Please obtain the latest version of Safety Data
Sheet (SDS) from our Sales Department.
②
Weal protective gears such as rubber gloves, protective goggle and
so on.
Should the oil touched to your hand are entered in your eye,
immediately follow the emergency treatment described on the SDS.
CAUTION
Ensure to use the vacuum pump oil designated by ULVAC.
Operation using oil other than designated shall be out of our scope of
guarantee as it might impair the Pump
performance and shorten the life
cycle.
CAUTION
①
The oil level comes down approximately 1cm when operated the
Pump. Do not start the Pump with the minimum level oil.
② Be sure to lubricate the machine. If the
lubrication oil came down lower than limit level
during operation, it might give damage on the
bearing and shaft sealing and result in leak,
noise, motor overload and operation stop.
③ Spec.B and Spec.H pump also need oil supply
to Oiler. Fill the Oiler with oil until 50-80% of all.
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