Ulvac VD30C - Performance Specifications

YK15-0009-DI-002-04
7
2.2 Performance Specifications
Table. 4 Specifications
VD30C VD40C VD60C VD90C
m
3
/hr
30 40 60 90
L/min 500 670 1000 1500
cfm 17.66 23.54 35.31 52.97
m
3
/hr
36 48 72 108
L/min 600 800 1200 1800
cfm 21.29 28.25 42.38 63.57
Pa
Torr
mbar
Pa
Torr
mbar
Pa
1300 1360 1320 970
Torr 9.8 10.2 9.9 7.3
mbar 13.0 13.6 13.2 9.7
Pa 1400 1760 2800 2820 *2
Torr 10.5 13.2 21.0 21.2
mbar 14.0 17.6 28.0 28.2
50Hz
g/h
190 270 430 480
60Hz
g/h
250 410 1100 1650 *2
2.2(4) 3.7(4)
2.95(4) 4.96(4)
L
kg 58 60 90 113
mm 210 x 660 x 324 210 x 680 x 324 280 x 761 x 371 280 x 831 x 371
*1
Measured with a Pirani gauge. (Apprx. 6.7X10
-2
Pa when measured with a McLeod vacuum gauge.)
*2 VD90C is not allowed the continuous operation in the inlet pressure at 1,000Pa or more.
VD90C maximum water vapor tolerance / maximum water vapor capacity (in the continuous operation) : 1000Pa / 600g/h
*3 Increased safety explosion-resistant motor and pressure proof explosion-resistant motor are available as an option.
*4 Factory shipment setup is 200V class
Δ
delta connection. Please change it to Y connection if working voltage is 400V class.
*5 Other oil types are available, upon request.
*6 High load operation means repeat pumping down between atmospheric pressure and vacuum
in short term or long time operation at 10,000 Pa (75 Torr) or higher.
Recommended oil mist trap (Optional) *6
TM201: for low load operation
TM401: for high load operation
TM401: for low load operation
TM-2: for high load operation
Options
Oil mist trap, gas ballast valve, oil return mechanism,
ISO flange, explosion-resistant motor,
special type for special application (spec F, N, B and H)
Weight
External dimensions WxDxH
Applicable standard CE / cTUVus
Standard accessory A dose of oil, a set of Quick Start Manual
Inlet VG40 equivalency / KF40 (optional) VG50 equivalency / KF50 (optional)
Outlet VG40 equivalency / KF40 (optional)
Cooling method
Air cooled
2 (4)
Voltage *4
50Hz 200V
～
240V/380V
～
415V
60Hz 200V
～
240V/380V
～
460V
Oil *5
ULVOIL R-72
Oil capacity
1.0 ~ 2.5 2.5 ~ 4.0
Maximum water
vapor capacity
Gas ballast
port open
Motor *3
Type
Totally enclosed fan cooled 3 phase induction motor
Energy efficiency class
IE3
kw (number of poles) 1.5(4)
HP (number of poles)
Gas ballast port open 2
1.5×10
-2
2.0×10
-2
Maximum water
vapor tolerance
Gas ballast
port open
50Hz
Gas ballast
port open
60Hz
Ultimate
pressure *1
Gas ballast port close 0.67
5×10
-3
6.7×10
-3
Specifications
Model
Designed pumping speed 50Hz
60Hz
CAUTION
When you use the Pump in Quebec, Canada, French labels and
instruction manual are necessary. Please contact beforehand.