Ulvac VD30C - Safety Data Sheet（Sds

YK15-0009-DI-002-04
3
1.2 Safety Data Sheet（SDS）
IMPORTANT
Chemical material used for this Pump;
(1) ULVOIL R-72 (Standard)
(2) ULVOIL R-42（For cold district in winter、
In the case of ambient temperature 4-10℃)
The Safety Data Sheet
introduces the chemical material potential to use
or touch on operating this machine.
Please contact our Sales division if you are in need.
Read it with attention to acknowledge the toxic characteristics described
on the SDS.
Please do not use the chemical material except the above-
mentioned
chemical material (vacuum pump oil).
CAUTION
SDS is posted as referential to ensure safe operation of the hazardous
and/or toxic chemical material. Any person in charge of operating
the
Pump
oil shall be requested to be responsible to cause means
appropriate to actual operation of the machine referring to it.
Note that the SDS itself shall be never a safety certificate in any manner.