YK15-0009-DI-002-04
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4.3 Operation Stop
(1) Close the main valve on the Inlet side, open the leak valve to vent the Pump to atmosphere,
and stop the Pump.
(2) Open the Suction leak valve to make atmospheric pressure inside the Pump.
WARNING
The Vacuum pump gets high temperature during operation. Refrain from
touching the Motor and Pump unit until the Pump
stopped operation.
Apply an appropriate protection to avoid touching
necessary.
CAUTION
① Ensure to close the Main valve and open the Leak valve to stop
Pump. if failed in following this procedure, the Pump
filled with the oil in several minutes, which might make difficult to
restart operation or give damage to the Pump unit.
Further the oil might accidentally flow back to the Vacuum chamber.
② If failed in closing the Main valve
, the vacuum might leak from the
Exhaust side through the Pump unit.
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