Contents
Splošne informacije 175
Shranjevanje 176
Priprava za montažo 177
Montaža 178
Uporaba 180
Vzdrževanje 181
Odlaganje opadkov 181
16 Instructions for Use 183
Safety Guideline for Turbomolecular Pumps 184
General Information 185
Storage 186
Preparation for installation 187
Installation 188
Use 190
Maintenance 191
Disposal 192
17 Technical Information 193
Description of the Turbo-V 81-M 194
Technical Specification 198
Turbo-V 81-M Outline 200
Inlet Screen Installation 202
Heater Band Installation 205
Turbo-V 81-M User Manual / 87-900-983-01 (E) 11/228