Technical Information 17
Turbo-V 81-M User Manual / 87-900-983-01 (E) 215/228
With Standard Rack Controller
Figure 29
1 Turbo-V standard rack controller
2 Vent valve
3 Vacuum pump shut-off valve (optional)
4 System vent valve (optional)
5 Vacuum chamber
6 Ionization gauge
7 Fore-vacuum pump connecting flange
8 Oil mist eliminator
9 Fore-vacuum pump with internal one-way valve
10 Fore-vacuum pump control relay
11 Connection for water cooling
12 Roughing line with valve (optional)
13 Turbopump
14 Flexible connection
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