Agilent Technologies Turbo-V 81-M Series

17
Technical Information
Technical Specification
198/228 Turbo-V 81-M User Manual / 87-900-983-01 (E)
Technical Specification
Tab. 2 Technical Specification
Pumping speed With ISO 63 or CFF
4.5”
N
2
: 77 l/s
He: 65 l/s
H
2
: 50 l/s
With KF 40 NW or CFF
2.75”
N
2
: 50 l/s
He: 56 l/s
H
2
: 46 l/s
Compression ratio N
2
: 3 x 10
8
He: 8 x 10
4
H
2
: 7 x 10
3
Base pressure *
(with recommended forepump)
mechanical: 5 x 10
-10
mbar (3.8 x 10
-10
Torr)
diaphragm: 5 x 10
-9
mbar (3.8 x 10
-9
Torr)
Inlet flange ISO 63 KF 40 NW
CFF 4.5” O.D. CFF 2.75” O.D.
Foreline flange KF16 NW
Rotational speed 1350 Hz (max)
Start-up time < 60 seconds
Cooling requirements Natural air convection
Forced air or water optional
Recommended forepump mechanical: Agilent DS 42 – DS 102
dry pump: Agilent SH 100
Operating position any
Coolant water flow: 10 l/h (0.05 GPM)
temperature: + 15 °C to + 35 °C
pressure: 2 to 4 bar (30 to 60 Psi)
Operating ambient temperature
with natural air convection
+5 °C to +25 °C
Operating ambient temperature
with forced air cooling or water
+5 °C to +35 °C
Bakeout temperature 120° C at inlet flange max. (CF flange)
80° C at inlet flange max. (ISO flange)
Vibration level (displacement)
< 0.01 μm at inlet flange
Noise level
≤ 45 dB (A) at 1 meter