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Azbil Micro Flow CMS9500 - Chapter 5. Troubleshooting; X84; Countermeasures for Abnormal Operation

Azbil Micro Flow CMS9500
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26
Countermeasures for abnormal operation
See the following table in case of abnormal operation of this device.
Phenomenon Countermeasure
The display is blank. • Check that the supplied power and polarity are correct.
• Check that the connector is connected correctly.
ALH
1
is displayed. The instantaneous ow rate has exceeded 120 % of the measurement range.
Reduce the ow rate to within the range.
When the ow returns to normal, the owmeter will also return to normal automatically.*
Err
1
is displayed. Sensor error
Check for an excessive ow or reverse ow.
When the ow returns to normal, the owmeter will also return to normal automati-
cally.
If the device does not return to normal, contact the azbil Group.
Call for repair.
Err2
is displayed. Memory error
Contact the azbil Group.
Call for repair.
There is an output
signal when the ow
rate is zero.
• Check for gas leaks from the piping.
• Check that the wiring is correct.
• If the owmeter is installed vertically, reinstall it horizontally.
If an incorrect zero point of the sensor seems likely to be causing the problem, execute
zero ow rate calibration.
"Zero ow rate calibration" (page 25)
The ow rate is not
correct.
• Check for gas leaks from the piping.
Check if there is a foreign substance such as dust or oil in the pipe or the connection
port of the owmeter.
If oil is found, contact the azbil Group and ask for repair.
• Check that the wiring is correct.
• Check that the ow rate does not change within a few seconds.
Check that the ow rate does not greatly exceed the measurement range.
(In such a case, the indicated ow rate may indicate lower values than the actual ow rate.)
The displayed ow
rate is lower than
expected.
Check if the gas contains oil, moisture, or a foreign substance such as dust or rust.
If foreign matter is found in the piping, ow path, etc., contact the azbil Group and ask
for repair.
There should be no
ow but a ow is
indicated.
Even though the
displayed instanta-
neous ow rate is
zero, the totalized
ow is counting up
or counting down.
Check for a gas leak or ow in the piping.
Even if the displayed instantaneous ow rate is zero, there might be a very small ow
below the minimum displayed ow rate.
Even such a small ow is counted in the totalized ow.
Set the low ow cuto to prevent totalized ow count-up or countdown.
Function setup 12, "Low ow cuto" (page 19)
* If the ow rate greatly exceeds the ow rate range,
ALH
1
may not be displayed.
Behavior
when the ow rate greatly exceeds the measurement range (P.7)
Chapter 5. Troubleshooting

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