1
Overview
SUS/SUS316 models of CMS 9500/0002/0005/0020/0050/0200/0500
Gas Mass Flow Meters measure mass flow by means of a Micro Flow
thermal mass flow sensor (hereafter, μF sensor) developed by Azbil
Corporation
Integrating the µF sensor with advanced channel design technology
has achieved high accuracy and high rangeability.
Features
• The CMS incorporates μF sensors made with silicon micromachin-
ing and thin-film technology.
The µF sensor is a highly sensitive flow speed sensor with fast
response. Each of its sides is only 1.7 mm long, and it is just 0.5 mm
thick.
• Because the CMS is a mass flowmeter, its measurements are not
affected by temperature or pressure.
• Provides high accuracy (±3 % rdg.*) and high rangeability (100:1).
Model Measurement range
CMS9500 5–500 mL/min (standard)
CMS0002 0.02–2 L/min (standard)
CMS0005 0.05–5 L/min (standard)
CMS0020 0.2–20 L/min (standard)
CMS0050 0.5–50 L/min (standard)
CMS0200 2–200 L/min (standard)
CMS0500 5–500 L/min (standard)
* "Rdg." (reading ) is the value indicated by the device.
Chapter 6. Specifications (P. 28).
• To meet a variety of requirements, the CMS's functions include
analog output, event output, totalized/reverse-totalized flow display,
output scaling, gas type selection, totalizer pulse output, external
contact input (totalized flow count reset input), serial data output,
etc.
• Straight pipe sections are not required before and after this device
(if the device and the pipes have the same pipe size).
Chapter 1. Overview
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