Azbil Micro Flow CMS9500 - X84; Pressure Loss

40
Chapter 6. Specifications

Pressure loss
The graphs below show the data for air.
If a gas other than air is used, multiply by the specific gravity in the
table below.
Specic gravity (with air as 1.0)
Argon 1.38
Carbon dioxide (CO
2
) 1.53
Oxygen 1.11
Fuel gas 13A 0.64
100 % Methane 0.56
100 % Propane 1.56
100 % Butane 2.08
Example: For the CMS9500, if the primary pressure is 100 kPa and
the flow rate is 500 mL/min, the pressure loss for argon is
calculated as follows.
On the graph for CMS9500, the pressure loss is about 4.3
Pa when the primary pressure is 100 kPa and the flow rate
is 500 mL/min.
4.3 × 1.38 (specific gravity of argon) = 5.934 Pa.
1.0
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
0
0.0
200 400 600100 300 500
Flow rate (mL/min, standard)
Pressure loss (Pa)
CMS9500
Primary pressure
0.5 kPa
100 kPa
300 kPa
500 kPa
700 kPa