Azbil Micro Flow CMS9500 - Chapter 6. Specifications; X84; General Specifications

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General specifications
Item CMS9500 CMS0002 CMS0005
Compatible gas types*
1
Air/nitrogen, argon, oxygen, carbon dioxide (CO
2
), fuel gas 13A (LNG base)*
2
,
100 % methane, 100 % propane, and 100 % butane.
The gas must be dry and not contain corrosive components (chlorine, sulfur, or acid).
Also, it must be a clean, without dust or oil mist.
Airow range*
3
0 to 500 mL/min (standard) 0 to 2 L/min (standard) 0 to 5 L/min (standard)
L/min (standard) indicates the volumetric ow rate per minute converted to condi-
tions of 20 °C and 101.325 kPa (1 atm).
Maximum
measurable
ow rate for
each gas, nor-
malized for 20
°C and 101.325
kPa
Air/nitrogen 500 mL/min 2 L/min 5 L/min
Argon 500 mL/min 2 L/min 5 L/min
Carbon dioxide (CO
2
) 250 mL/min 1 L/min 3.3 L/min
Oxygen*
4
500 mL/min 2 L/min 5 L/min
Fuel gas13A (46 MJ)*
2
400 mL/min 1.5 L/min 4 L/min
Methane 500 mL/min 2 L/min 5 L/min
Propane 140 mL/min 0.5 L/min 1.7 L/min
Butane 100 mL/min 0.4 L/min 1.25 L/min
Fuel gas 13A (45
MJ)*
2
400 mL/min 1.5 L/min 4 L/min
Measurement accuracy at 23 °C
and 101.325 kPa (χ : measured
ow rate)*
5
5 ≤ χ < 100 mL/min
±1 % FS ± 1 digit
100 ≤ χ ≤ 500 mL/min
±3 % rdg. ± 1 digit
0.02 ≤ χ < 0.4 L/min
±1 % FS ± 1 digit
0.4 ≤ χ ≤ 2 L/min
±3 % rdg. ± 1 digit
0.05 ≤ χ < 1 L/min
±1 % FS ± 1 digit
1 ≤ χ ≤ 5 L/min
±3 % rdg. ± 1 digit
Temperature characteristics at
-10 to +60 °C*
6
0 to 75 % of flow rate range: ±0.10 % FS / °C ±1 digit or less
75 to 100 % of flow rate range: ±0.15 % FS / °C ±1 digit or less
Pressure char-
acteristics*
7
Operating pressure
0 to 1.0 MPa
±0.1 % FS per 0.1 MPa ±1 digit or less ±0.25 % FS per 0.1 MPa
±1 digit or less
Operating pres-
sure (negative )
-0.07 to 0 MPa
±0.2 % FS per 0.01 MPa ±1 digit or less
Operating temperature -10 to +60 °C
Storage temperature -20 to +70 °C
Operating humidity 10 to 90 % RH (without condensation)
Operating pressure range -0.07 to +1.0 MPa
Pressure resistance 1.5 MPa
Pipe size, connection rating SUS model: Rc 1/4
SUS316 model: 9/16-18 UNF, Rc 1/4, 1/4 Swagelok, 1/4 VCR (selectable by model
number)
Main unit material SUS model: SUS303 and SUS316
SUS316 model: SUS316
Case material Polycarbonate
Mounting orientation Horizontal mounting. (The display unit should not face downward.) If this device is
mounted vertically, drift may occur due to the mounting orientation when the flow
rate is zero.
For details, contact the azbil Group.
Rated voltage 12 to 24 V DC
Supply voltage range 11.4 to 25.2 V DC
Current consumption 100 mA max.
Sampling cycle 100 ±10 ms
Chapter 6. Specifications