Azbil Micro Flow CMS9500 - Page 37

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Chapter 6. Specifications
CMS0020 CMS0050 CMS0200 CMS0500
Air/nitrogen, argon, oxygen, carbon dioxide (CO
2
), fuel gas 13A (LNG base)*
2
, 100 % methane, 100 % propane,
and 100 % butane.
The gas must be dry and not contain corrosive components (chlorine, sulfur, or acid).
Also, it must be a clean, without dust or oil mist.
0 to 20 L/min (standard) 0 to 50 L/min (standard) 0 to 200 L/min (standard) 0 to 500 L/min (standard)
L/min (standard) indicates the volumetric flow rate per minute converted to conditions of 20 °C and 101.325 kPa (1
atm).
20 L/min 50 L/min 200 L/min 500 L/min
20 L/min 50 L/min 200 L/min 500 L/min
10 L/min 25 L/min 100 L/min 250 L/min
20 L/min 50 L/min 200 L/min 500 L/min
15 L/min 40 L/min 150 L/min 400 L/min
20 L/min 50 L/min 200 L/min 500 L/min
5 L/min 14 L/min 50 L/min 140 L/min
5 L/min 12 L/min 50 L/min 120 L/min
15 L/min 40 L/min 150 L/min 400 L/min
0.2 ≤ χ < 2 L/min
±1 % FS ± 1 digit
2 ≤ χ ≤ 20 L/min
±3 % rdg. ± 1 digit
0.5 ≤ χ < 5 L/min
±1 % FS ± 1 digit
5 ≤ χ ≤ 50 L/min
±3 % rdg. ± 1 digit
2 ≤ χ < 20 L/min
±1 % FS ± 1 digit
20 ≤ χ ≤ 200 L/min
±3 % rdg. ± 1 digit
5 ≤ χ < 50 L/min
±1 % FS ± 1 digit
50 ≤ χ ≤ 500 L/min
±3 % rdg. ± 1 digit
0 to 75 % of ow rate range: ±0.10 % FS / °C ±1 digit or less
75 to 100 % of ow rate range: ±0.15 % FS / °C ±1 digit or less
±0.2 % FS per 0.1 MPa
±1 digit or less
±0.1 % FS per 0.1 MPa
±1 digit or less
±0.2 % FS per 0.2 MPa
±1 digit or less
±0.2 % FS per 0.01 MPa ±1 digit or less
-10 to +60 °C
-20 to +70 °C
10 to 90 % RH (without condensation)
-0.07 to +1.0 MPa
1.5 MPa
SUS model: Rc 1/4
SUS316 model: 9/16-18 UNF, Rc 1/4, 1/4 Swagelok, 1/4 VCR
(selectable by model number)
SUS model: Rc 1/2
SUS316 model: 3/4-16 UNF, Rc 1/2, 1/2 Swagelok, 1/2 VCR or
equivalent (selectable by model number)
SUS model: SUS303 and SUS316
SUS316 model: SUS316
Polycarbonate
Horizontal mounting. (The display unit should not face downward.) If this device is mounted vertically, drift may occur
due to the mounting orientation when the ow rate is zero.
For details, contact the azbil Group.
12 to 24 V DC
11.4 to 25.2 V DC
100 mA max.
100 ±10 ms